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The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions. The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.
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The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions. The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.

TTS10 Specifications

Reach 1066 mm
Repeatability 0.1 mm
Number of Axes 4

TTS10 Resources