TTS20 Pricing

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TTS20 Overview

What is TTS20?

The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions. The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.

What are the specifications of TTS20?

Reach 1066 mm

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