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Automated Reticle Sorting with Omron Viper Robot

Problem

Viper- the heart of the reticle applications process.

Solution

The number one feature that adds to the value of this robot is cleanliness. Not all or six axes robots on the market have the cleanliness that's needed for the reticle application. They are very sensitive to particle generation. The compact form factor is also extremely important because footprint and ISO one fabs is a critical piece. It has to be big enough to reach all of the stations but compact enough to have a small frame.