KAWASAKI TTS10 Specifications
Ranked Nr. 78 of 415 Industrial (Articulated) Robots
The TTS series robot can access 2 and 3 FOUPs of EFEM without a track.
The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions.
The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.
Reach | 1066 mm |
Repeatability | 0.1 mm |
Number of Axes |